The development of advanced piezoelectric α‐quartz microelectromechanical system (MEMS) for sensing and precise frequency control applications requires the nanostructuration and on‐chip integration of this material on silicon material.
However, the current quartz manufacturing methods are based on bonding bulk micromachined crystals on silicon, which limits the size, the performance, the integration cost, and the scalability of quartz microdevices. Here, chemical solution deposition, soft‐nanoimprint lithography, and top‐down microfabrication processes are combined to develop the first nanostructured epitaxial (100)α‐quartz/(100)Si piezoelectric cantilevers. The coherent Si/quartz interface and film thinness combined with a controlled nanostructuration on silicon–insulator–silicon technology substrates provide high force and mass sensitivity while preserving the mechanical quality factor of the microelectromechanical systems. This work proves that biocompatible nanostructured epitaxial piezoelectric α‐quartz‐based MEMS on silicon can be engineered at low cost by combining soft‐chemistry and top‐down lithographic techniques.
Oxides for new-generation electronics
Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System
Claire Jolly, Andres Gomez, David Sánchez‐Fuentes, Dilek Cakiroglu, Raïssa Rathar, Nicolas Maurin, Ricardo Garcia‐Bermejo, Benoit Charlot, Martí Gich, Michael Bahriz, Laura Picas, Adrian Carretero‐Genevrier
The layered perovskite YBaCuFeO5 (YBCFO) is considered one of the best candidates to high-temperature chiral multiferroics with strong magnetoelectric coupling. In RBaCuFeO5 perovskites (R: rare-earth or Y) A-site cations are fully ordered whereas their magnetic properties strongly depend on the preparation process. They exhibit partial cationic disorder at the B-site that generates a magnetic spiral stabilized through directionally assisted long range coupling between canted locally frustrated spins.
We report the synthesis and theoretical study of two new colorimetric chemosensors with special selectivity and sensitivity to Ni2+ and Cu2+ ions over other metal cations in the CH3CN/H2O solution. Compounds (E)-4-((2-nitrophenyl)diazenyl)-N,N-bis(pyridin-2-ylmethyl)aniline (A) and (E)-4-((3-nitrophenyl)diazenyl)-N,N-bis(pyridin-2-ylmethyl)aniline (B) exhibited a drastic color change from yellow to colorless, which allows the detection of the mentioned metal cations through different techniques.
Early detection of diabetes, a worldwide health issue, is key for its successful treatment. Acetone is a marker of diabetes, and efficient, non-invasive detection can be achieved with the use of nanotechnology. In this paper we investigate the effect of acetone adsorption on the electronic properties of silicon nanowires (SiNWs) by means of density functional theory.
Epitaxial orthorhombic Hf0.5Zr0.5O2 (HZO) films on La0.67Sr0.33MnO3 (LSMO) electrodes show robust ferroelectricity, with high polarization, endurance and retention. However, no similar results have been achieved using other perovskite electrodes so far. Here, LSMO and other perovskite electrodes are compared.
Though first order transitions are thought to be abrupt, materials find cunning ways to smooth the jump. Here we show that VO2 chooses making beautiful tapestries at the atomic scale. To see how, and how they affect its intriguing metal-insulator transition, continue reading: